External Career 【 display / non-display 】

External Career 【 display / non-display 】

Research accomplishments 【 display / non-display 】

Research accomplishments 【 display / non-display 】

• Highly selective Si3N4 etching on Si using pulsed-microwave CH3F/O2/Ar plasma

  Japanese Journal of Applied Physics    2023.11.01

  DOI

• Reaction kinetics studies for phenol degradation under the impact of different gas bubbles and pH using gas–liquid discharge plasma

  Japanese Journal of Applied Physics    2023.11.01

  DOI

• Contribution of active species generated in plasma to CO2 methanation

  Japanese Journal of Applied Physics    2023.09.01

  DOI

• Improving the efficiency of Sabatier reaction through H2O removal with low-pressure plasma catalysis

  Japanese Journal of Applied Physics    2023.09.01

  DOI

• Silicon surface passivation with a-Si:H by PECVD: growth temperature effects on defects and band offset

  Japanese Journal of Applied Physics    2023.09.01

  DOI

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